A pressure sensor converts change of mechanical pressure in gases or liquids into electrical signals. The most common types of pressure sensors are based on the piezoresistive, capacitive or piezoelectric principle.
How does a pressure sensor work?
A pressure sensor measures pressure using the deformation caused at a membrane under the pressure. With different sensor technologies, the deformation is converted into electrical signals for processing and transmission to external devices for monitoring and control of pressure-related processes. Pressure measurement is one of the most important and most common technologies for machine and system monitoring and control in process technology. Baumer offers a broad portfolio of pressure sensors for a multifaceted applications.
A pressure sensor includes several main components. A pressure sensor consists of a measuring diaphragm deforming at changing pressure, an opening for pressure intake, various sensor elements (e.g. piezoelectric, capacitive or piezoresistive), a signal processing unit for signal amplification and processing, a protective housing as well as electrical and mechanical connections for connectivity to external devices. These components interact to provide precise pressure measurement results in various applications.
Basically, there are different pressure sensor types based on different measuring principles:
Resistive pressure sensors measure pressure by change in the electrical resistance resulting from mechanical stress imposed on a material.
Piezoelectric pressure sensors generate electrical voltage through charge displacement in piezoelectric material under pressure.
Capacitive pressure sensors detect changing capacitance in a capacitor caused by membrane deformation.
Inductive pressure sensors measure pressure by changing coil inductance at moving a magnetic core or membrane.
Pressure sensors with Hall element use the Hall effect to measure pressure changes.
MEMS pressure sensors use micro-mechanical structures on a silicon chip to measure pressure.
Baumer has specialized in the common resistive pressure sensors and piezoresistive pressure sensors. Here you encounter the Baumer pressure sensors.
Principles for pressure measurement
Absolute pressure
Absolute pressure means the pressure in relation to a complete vacuum and is therefore always positive. It is measured in units such as Pascal (Pa), Bar or Psi (abs). Measurements are with sensors using a vacuum as a reference. Frequently used are MEMS sensors, capacitive sensors and piezoresistive sensors, which measure pressure by deformation of a membrane or change in electrical properties.
Typical areas of application:
Monitoring or controlling physical processes by the absolute pressure, such as steam pressure in sterilizers or autoclaves
Relative pressure is measured in relation to the prevailing air pressure and can assume positive or negative values. It is specified in units such as Pascal (Pa), Bar or Psi (gauge). Relative pressure sensors require regular calibration and operate on different technologies. Piezoelectric and capacitive sensors to convert change in pressure into electrical signals. These sensors often provide ventilation holes for referencing.
Pressure measurement in hydraulic or pneumatic systems
Differential pressure
Differential pressure means the pressure difference between two points in the system and can assume positive or negative values. It is measured in units such as Pascal (Pa), Bar or Psi and uses various sensor technologies such as capacitive and piezoelectric pressure sensors. Differential pressure sensors are less sensitive to ambient conditions and require regular calibration. Differential pressure can also be measured with two individual sensors that deliver two signals to the control unit for calculating the differential pressure.
In semiconductor materials, the change in the specific resistance and hence the signal results from differing electron mobility in crystalline structures. The mobility is influenced by mechanical load. A stainless steel membrane (encapsulation) separates the sensitive silicon chip from the process medium. Depending on the application, kerosene or silicone oil is used as transmission fluid for internal pressure transmission.
In semiconductor materials, the change in the specific resistance and hence the signal results from differing electron mobility in crystalline structures. The mobility is influenced by mechanical load. A stainless steel membrane (encapsulation) separates the sensitive silicon chip from the process medium. Depending on the application, kerosene or silicone oil is used as transmission fluid for internal pressure transmission.
Transmitters with piezoresistive silicon technology characterize by high measuring precision and long-term stability. Thanks to their all-welded housing, they are durable and can also be deployed in hazardous areas (ATEX).
They even are appropriate for small measuring ranges, especially in hydrostatic level measurements from heights of 0.5 m onward.
The basic body consists of a ceramic monolith with the resistors printed on the back of the membrane. Here, the ambient air pressure acts as reference pressure. This principle only enables measuring relative pressure. Ceramic measuring cells characterize by good long-term stability and corrosion resistance. Since ceramic cannot be welded to the process connection, a seal is required for media separation. In ceramic thick-film technology, four resistors are connected to form a Wheatstone bridge. The membrane center means maximum membrane elongation when under pressure, whereas at the margins there is maximum compression. In ceramic cells, the measuring diaphragm is also as medium-separating diaphragm. No internal transmission fluid required.
The measuring layer is between a thin ceramic membrane and a ceramic base body. The necessary clearance for the deflection of the diaphragm is created by the deliberately generated gap. The resulting volume can be ventilated or evacuated with the ambient pressure to measure the relative or absolute pressure. Ceramic measuring cells characterize by good long-term stability and corrosion resistance. Since ceramic cannot be welded to the process connection, a seal is required for media separation. In ceramic thick-film technology, four resistors are connected to form a Wheatstone bridge. The membrane center means maximum membrane elongation when under pressure, whereas at the margins there is maximum compression. In thin-film cells, the measuring membrane acts also as medium-separating membrane. No internal transmission fluid required.
The base body is made of stainless steel. The resistance structure is created by photolithography. Thin-film measuring cells characterize by excellent resistance to pressure peaks and burst pressure. Even extremely high pressure is reliably measured- also under high shocks and vibrations. In metal thin-film technology, four interconnected resistors form a Wheatstone bridge. The membrane center means maximum membrane elongation when under pressure, whereas at the margins there is maximum compression. In thin-film cells, the measuring membrane acts also as medium-separating membrane. No internal transmission fluid required. As a rule, thin-film technology is to measure relative pressure, since a vacuum at the back of the membrane is quite a construction effort.
Temperature dependency and temperature tolerance
The ambient and medium temperature have a severe influence on the accuracy of a pressure sensor. The temperature tolerance of each sensor defines its accuracy at different temperatures.
Standard measuring error and/or maximum measuring error are specified in relation to a reference temperature, usually 20 °C. However, usually the sensor operation temperature is not 20°C nor constantly the same. This affects the standard and maximum measuring error and can impair the result.
In operating conditions with another than the reference temperature (e.g. 20 °C), the sensor's standard or maximum measuring error must therefore be considered. At operating temperatures that differ from the reference temperature (e.g. 20°C), a temperature-resistant pressure sensor with lower initial accuracy is preferred against an unstable pressure sensor with higher initial accuracy.
Temperature dependency of the max. measurement deviation
Temperature dependency and different initial accuracy; blue: high-stability Baumer pressure sensor, gray: examples products of market competitors, blue dashed: high-stability Baumer pressure sensor with slightly inferior initial accuracy
Error specification
Baumer specifies the "maximum error rate" meaning statistically 99.7% of the sensors fulfill the specification. Competitors may specify the "typical defect rate", meaning 32% of the products do not fulfill the specification.
Access here our guideline "How to properly interpret the specifications of pressure sensors"
Hot steam is used to sterilize appliances and systems. Small elements like sensors (PBMH autoclavable), can be sterilized in autoclave chamber. In big installations, hot steam is passed through the system which is known as "sterilization in place" (SIP). The sensors must be correspondingly resilient, though usually signal evaluation is not during sterilization. The sensors must endure hot temperatures of about 134 °C and more than 3-bar pressure for the time of the sterilization process, usually 30 min. Pressure and temperature go physically together, as shown in the saturated steam curve.
The Baumer PBMx and PFMx pressure sensors are ideal for sterilization process control. They deliver precise values even with rapid temperature fluctuations and thus ensure reliable process control by pressure resulting in the related required temperature.
Explanation of terms and correlations
Precision describes the possible deviation of a single measuring operation from the average of many measured values, which is understood as circle pattern. High precision: small circle pattern, low precision: large circle pattern.
Accuracy describes the deviation (offset) of the average of several measured values towards the true value. High accuracy: small offset, low accuracy: large offset.
Standard measuring error: Specified via the minimum value (Best Fit Straight Line, BFSL) and describes the precision (circle pattern).
Maximum measuring error: comprises standard measurement error and the sensor offset.
Conversion table
The most common pressure units are Pascal (Pa), millibar (mbar), millimeters of water column (mmH₂O), pounds per square inch (psi) and Torr. The table below provides the related conversions.